In combination with our MatchingCubes the Shoebox RF Generators geeignet für ICP and CCP systems. They are applied in RF Sputtering, Thin Film Coating, PE-CVD, Reactive Ion Etching (RIE) and Substrate Biasing.
The RF Generators of the Shoebox family are modern and robust. They work with an efficiency of typically 70% or more. A micro controller takes care that the generator operates safe and reliable under any circumstances. You control the RF Generator via its serial interface. A software is included in the shipment.
|RF Power Accuracy:||+- 3% / 3W||Cooling:||Forced Air|
|Load Impedance:||50 Ohms||Mains Power:||90 – 240V / 50 Hz|
|Harmonic Distortion||RF Output:||N|
|Pulse Frequency:||10 kHz max.||Remote Control RS-232:||Sub-D9|
|Pulse Length:||50 – 9949 usec.||MatchingCube:||Sub-D9|
|Ambient Temperature:||10 – 35°C||Analog Interface:||Sub-D25|
The above data are typical default values.
Please request a data sheet for any specific model.
|Art.No.||Product||Frequency [MHz]||Power [W]|
Other models are available upon request.