barthel HF-Technik GmbH
Roermonder Str. 321
52072 Aachen
Germany
Phone: +49 (0)241-45015-40
Fax: +49 (0)241-45015-38
Email: mail(at)barthel-hf.com
Web: www.barthel-hf.com
ISO 9001:2015 certified
Shoebox
13.56MHz/300W
In combination with our MatchingCubes the Shoebox RF Generators geeignet für ICP and CCP systems. They are applied in RF Sputtering, Thin Film Coating, PE-CVD, Reactive Ion Etching (RIE) and Substrate Biasing.
The RF Generators of the Shoebox family are modern and robust. They work with an efficiency of typically 70% or more. A micro controller takes care that the generator operates safe and reliable under any circumstances. You control the RF Generator via its serial interface. A software is included in the shipment.
| RF Power Accuracy: | +- 3% / 3W | Cooling: | Forced Air |
| Load Impedance: | 50 Ohms | Mains Power: | 90 – 240V / 50 Hz |
| Harmonic Distortion | RF Output: | N | |
| Pulse Frequency: | 10 kHz max. | Remote Control RS-232: | Sub-D9 |
| Pulse Length: | 50 – 9949 usec. | MatchingCube: | Sub-D9 |
| Ignition: | Interlock: | Sub-D9 | |
| Ambient Temperature: | 10 – 35°C | Analog Interface: | Sub-D25 |
The above data are typical default values.
Please request a data sheet for any specific model.
| Art.No. | Product | Frequency [MHz] | Power [W] |
|---|---|---|---|
| 198050 | RFG-13-100 | 13.56 | 100 |
| 198000 | RFG-13-300 | 13.56 | 300 |
Other models are available upon request.