13.56MHz/up to 1200W
In combination with our MatchingCubes the PowerCube geeignet für ICP and CCP systems. They are applied in RF Sputtering, Thin Film Coating, PE-CVD, Reactive Ion Etching (RIE) and Substrate Biasing.
Shortly, our new RF generators will be available: the PowerCube.
For this we combined the knowledge and experience gathered in many years. We are striving to meet three goals: The new product will be robust, flexible and economically priced . The product will come in two model lines:
PowerCube plain and PowerCube flex. In the PowerCube flex a fast ARM processor takes care of the flexibility: active front, digital interfaces, and fast pulse mode. The PowerCube plain is reduced to the essentials: analogue interface, common exciter, and slow pulse mode. Both generator lines will be available with different output power levels: 400 / 800 / 1200\,Watts. The first two power levels are cooled with air, the last with water. It will be possible to upgrade power levels if you should realize that you need more power than expected at the beginning. Moreover, it will be possible to upgrade from PowerCube plain to PowerCube flex .
Certainly, all PowerCube work seamlessly together with the MatchingCube .
|Power Regulation||PFOR||PFOR / PREAL / DC-BIAS|
|Pulse Frequency (internal)||–||kHz|
|Pulse Frequency (external)||kHz|
|External Pulse Input||SMA (TTL)||SMA (TTL)|
|Common Exciter||SMA (TTL)||SMA (TTL)|
|Phase Shifter CEX||–||0-360° in 2.5° steps|
|Remote Control||Analog (15p)||Analog (15p) |
RS-232 Ethernet Modbus
|Product||Frequency [MHz]||Power [W]|
Product is currently in design.