In combination with our MatchingCubes the Low Frequency Generators geeignet für ICP and CCP systems. They are applied in Etching, Dielectric Sputtering, PE-CVD, Substrate Biasing, Plasma Polymer Processing and DLC Coating.
The Low Frequency Generators are modern and robust. They provide the frequency as additional parameter so that you have another degree of freedom to optimize your application. A micro controller takes care that the generator operates safe and reliable under any circumstances. Thanks to the touch panel at the front you can control the RF generator with overview and convenience. You can control the RF Generator also via its serial interface. A software is included in the shipment.
|RF Power Accuracy:||+- 3% / 3W||Cooling:||Forced Air|
|Load Impedance:||50 Ohms||Mains Power:||90 – 240V / 50 Hz|
|Harmonic Distortion||RF Output:||N|
|Pulse Frequency:||20 kHz max.||Remote Control RS-232:||Sub-D9|
|Pulse Length:||50 – 9949 usec.||MatchingCube:||Sub-D9|
|Ambient Temperature:||10 – 35°C||Analog Interface:||Sub-D25|
|Power [W]||40-80 kHz||80-160 kHz||160-300 kHz||300-500 kHz|
Other models are available upon request.